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Pearson type IV and dual-Pearson representations of range profiles.
§Pearson IV
The Pearson system (K. Pearson, “Contributions to the mathematical theory
of evolution. II. Skew variation in homogeneous material”, Phil. Trans.
R. Soc. Lond. A 186 (1895) 343) is the family of densities with
d ln f / dx = -(x - c) / (b0 + b1 x + b2 x^2); its type IV member is
fixed by the first four moments. W. K. Hofker, “Implantation of boron in
silicon”, Philips Res. Repts. Suppl. No. 8 (1975), introduced it for ion
implantation profiles, characterised by Rp, ΔRp, γ and β.
We use the explicit form and moment inversion of J. Heinrich, “A guide to the Pearson type IV distribution”, CDF/MEMO/STATISTICS/PUBLIC/6820 (2004):
f(x) = k [1 + ((x - λ)/a)^2]^(-m) exp(-ν atan((x - λ)/a)),
r = 6 (β - γ^2 - 1) / (2β - 3γ^2 - 6), m = 1 + r/2,
D = 16 (r - 1) - γ^2 (r - 2)^2,
ν = -r (r - 2) γ / D^(1/2), a = σ D^(1/2) / 4, λ = μ - (r - 2) γ σ / 4,
k = |Γ(m + iν/2) / Γ(m)|^2 / (a B(m - 1/2, 1/2)).Validity region. The inversion needs 2β - 3γ^2 - 6 > 0 (then
r > 3, i.e. m > 5/2, so the fourth moment exists) and D > 0 (real
ν). Together these are Pearson’s type IV criterion 0 < κ < 1; the
boundary D = 0 (κ = 1, the type IV / VI border) is
β_IV(γ) = (48 + 39γ^2 + 6 (γ^2 + 4)^(3/2)) / (32 - γ^2) for γ^2 < 32,
which follows from solving D = 0 for β (a test checks the
equivalence). The Gaussian point γ = 0, β = 3 lies on the boundary, so a
nearly Gaussian sample can fall outside by noise; that is reported as
PearsonError::OutsideTypeIv, never as NaN.
The normalisation uses the real part of the complex log-gamma function by the Stirling series (M. Abramowitz and I. A. Stegun, Handbook of Mathematical Functions (1964), 6.1.40) after upward recurrence.
§Dual Pearson
A. F. Tasch, H. Shin, C. Park, J. Alvis and S. Novak, “An improved
approach to accurately model shallow B and BF2 implants in silicon”,
J. Electrochem. Soc. 136 (1989) 810, represent a profile as
R f_1(x) + (1 - R) f_2(x): two Pearson IV densities with their own four
moments and a fraction R. DualPearson::fit fits the nine parameters
to a depth histogram; the method is described there.
Structs§
- Dual
Pearson - A dual-Pearson profile
R f_head + (1 - R) f_tail(Tasch et al. 1989). - Dual
Pearson Fit - The result of
DualPearson::fit. - Pearson
Iv - A Pearson type IV density, stored both as the four moments it matches and as Heinrich’s parameters.
Enums§
- Pearson
Error - Errors from building a Pearson representation.
Functions§
- type_
iv_ min_ kurtosis - The type IV / VI boundary
β_IV(γ);Noneforγ^2 >= 32.